Scanning Electron Microscope - Revision history

Cmditradmin at 20:08, 17 March 2016

2016-03-17T20:08:52Z

← Older revision		Revision as of 13:08, 17 March 2016
Line 33:		Line 33:
	{{#ev:youtube\|pu_pMYMYBlw}}		{{#ev:youtube\|pu_pMYMYBlw}}

	Energy Dispersive X-ray Spectroscopy
			=== Energy Dispersive X-ray Spectroscopy ===


	Energy Dispersive X-ray Spectroscopy (EDX is used to determine the composition of a sample such as thin films. Not only can relative amounts of each atom be measured, but the distribution of the atoms in our samples can be mapped.		Energy Dispersive X-ray Spectroscopy (EDX is used to determine the composition of a sample such as thin films. Not only can relative amounts of each atom be measured, but the distribution of the atoms in our samples can be mapped.

Cmditradmin at 20:07, 17 March 2016

2016-03-17T20:07:49Z

← Older revision		Revision as of 13:07, 17 March 2016
Line 33:		Line 33:
	{{#ev:youtube\|pu_pMYMYBlw}}		{{#ev:youtube\|pu_pMYMYBlw}}

			Energy Dispersive X-ray Spectroscopy

			Energy Dispersive X-ray Spectroscopy (EDX is used to determine the composition of a sample such as thin films. Not only can relative amounts of each atom be measured, but the distribution of the atoms in our samples can be mapped.

			EDX is an extension of the Sirion Scanning Electron Microscope in the Molecular Analysis Facility, make sure to watch our SEM videos before continuing.

			How does EDX determine composition, or, in other words, differentiate between atoms? In general, atoms are composed of nuclei (protons and neutrons) with electrons orbiting around them at different energy levels. During SEM operation, a high-energy electron beam impinges on the sample. Some of these electrons collide with electrons residing at lower energy levels, and both scatter and leave the atom. As a result, an electron located at a higher energy level sees the vacancy and jumps at the opportunity to reside at lower energy level. When the electron moves to this lower energy level, it releases energy – specifically, x-rays. Because these electron transitions are characteristic of the specific element, the energy of these x-ray emissions is also characteristic of the element. You’ll also see that multiple electron transitions for an atom are possible because electrons can fall from different elevated levels.

			{{#ev:youtube\|pu_pMYMYBlw}}
	=== External Links ===		=== External Links ===
	*[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf Training Manual for Sirion SEM]		*[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf Training Manual for Sirion SEM]

Cmditradmin at 16:02, 3 November 2011

2011-11-03T16:02:32Z

← Older revision		Revision as of 09:02, 3 November 2011
Line 8:		Line 8:
	=== Overview ===		=== Overview ===
	[[Image:Sirion_sem.png\|thumb\|300px\|]]		[[Image:Sirion_sem.png\|thumb\|300px\|]]
	The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. ~~Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling.~~ The SEM is a useful tool for photonics research because it reveals nano-scale surface features and topography that is critical to the performance of multi-layer devices.		The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. The SEM is a useful tool for photonics research because it reveals nano-scale surface features and topography that is critical to the performance of multi-layer devices. SEM produces dramatic pictures that reveal 3D shapes and shadows.


	=== Significance ===		=== Significance ===
	~~In addition~~ to ~~producing detailed dramatic pictures that reveal 3D shapes~~ the SEM can be equipped with ~~auxilliary features~~ so it be used for elemental analysis using EDAX ~~and ebeam lithography~~.		Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for [[E-beam lithography]] or are equipped for focused ion beam (FIB) milling. SEM can be equipped with attachments so it be used for elemental analysis using Energy Disspersive X-ray spectroscopy EDAX.

	=== Operation ===		=== Operation ===


	Part 1 Tour and Sample Preparation		Part 1 Tour and Sample Preparation

Cmditradmin: /* Significance */

2011-11-03T15:59:10Z

Significance

← Older revision		Revision as of 08:59, 3 November 2011
Line 12:		Line 12:

	=== Significance ===		=== Significance ===
			In addition to producing detailed dramatic pictures that reveal 3D shapes the SEM can be equipped with auxilliary features so it be used for elemental analysis using EDAX and ebeam lithography.


	=== Operation ===		=== Operation ===

Cmditradmin: /* External Links */

2011-11-03T15:56:46Z

External Links

← Older revision		Revision as of 08:56, 3 November 2011
Line 39:		Line 39:

	=== External Links ===		=== External Links ===
			*[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf Training Manual for Sirion SEM]

			*[http://grover.mirc.gatech.edu/training/viewVideo.php?video=sem-high&size=0 Training video for Hitachi 3500H SEM at GT MiRC]
	~~[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf Training Manual for Sirion SEM]~~		*[[wikipedia:Scanning_electron_microscope Scanning Electron Microscope]]
			*[[wikipedia:Energy-dispersive_X-ray_spectroscopy EDAX]]
	[http://grover.mirc.gatech.edu/training/viewVideo.php?video=sem-high&size=0 Training video for Hitachi 3500H SEM at GT MiRC]
	[[wikipedia:Scanning_electron_microscope Scanning Electron Microscope]]
	[[wikipedia:Energy-dispersive_X-ray_spectroscopy EDAX]]
	[[category:Research equipment]]		[[category:Research equipment]]

Cmditradmin at 15:56, 3 November 2011

2011-11-03T15:56:02Z

← Older revision		Revision as of 08:56, 3 November 2011
Line 11:		Line 11:


			=== Significance ===


	~~See Wikipedia on [http://en.wikipedia.org/wiki/Scanning_electron_microscope Scanning Electron Microscope]~~

	=== Operation ===		=== Operation ===
Line 38:		Line 38:


			=== External Links ===

	~~Training Manual for Sirion SEM[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf]~~

	~~Training Video on~~ [http://~~grover.mirc~~.~~gatech~~.edu/~~training~~/~~viewVideo~~.~~php?video=sem-high&size=0 Hitachi 3500H~~ SEM ~~at GT MiRC~~]		[http://depts.washington.edu/cmditr/media/siriontraining_rev8_04223.pdf Training Manual for Sirion SEM]

	==~~= Significance ===~~		[http://grover.mirc.gatech.edu/training/viewVideo.php?video=sem-high&size=0 Training video for Hitachi 3500H SEM at GT MiRC]
			[[wikipedia:Scanning_electron_microscope Scanning Electron Microscope]]
			[[wikipedia:Energy-dispersive_X-ray_spectroscopy EDAX]]
	[[category:Research equipment]]		[[category:Research equipment]]

128.95.39.187: /* Operation */

2010-03-23T18:04:32Z

Operation

← Older revision		Revision as of 11:04, 23 March 2010
Line 16:		Line 16:

	=== Operation ===		=== Operation ===


	Part 1 Tour and Sample Preparation		Part 1 Tour and Sample Preparation
	{{#ev:youtube\|~~pu_pMYMYBlw~~}}		{{#ev:youtube\|c7EVTnVHN-s}}

	Part 2 Loading the Sample		Part 2 Loading the Sample
	{{#ev:youtube\|~~04Fvq5HWebA~~}}		{{#ev:youtube\|SaaVaILUObg}}

	Part 3 Setting the Working Distance		Part 3 Setting the Working Distance
	{{#ev:youtube\|~~NP5VckJfv04~~}}		{{#ev:youtube\|CNIrvGRXugU}}

	Part 4 Lens Alignment and Stigmation		Part 4 Lens Alignment and Stigmation
	{{#ev:youtube\|~~CNIrvGRXugU~~}}		{{#ev:youtube\|NP5VckJfv04}}

	Part 5 Moving the Stage and Imaging		Part 5 Moving the Stage and Imaging
	{{#ev:youtube\|~~SaaVaILUObg~~}}		{{#ev:youtube\|04Fvq5HWebA}}

	Part 6 Changing the Sample and Shutdown		Part 6 Changing the Sample and Shutdown
	{{#ev:youtube\|~~c7EVTnVHN-s~~}}		{{#ev:youtube\|pu_pMYMYBlw}}

Cmditradmin: /* Operation */

2010-01-19T21:07:44Z

Operation

← Older revision		Revision as of 14:07, 19 January 2010
Line 17:		Line 17:
	=== Operation ===		=== Operation ===
	Part 1 Tour and Sample Preparation		Part 1 Tour and Sample Preparation
	{{#ev:youtube\|~~QBo_JyRfV3E~~}}		{{#ev:youtube\|pu_pMYMYBlw}}

	Part 2 Loading the Sample		Part 2 Loading the Sample
	{{#ev:youtube\|~~QzDecvtha8k~~}}		{{#ev:youtube\|04Fvq5HWebA}}

	Part 3 Setting the Working Distance		Part 3 Setting the Working Distance
	{{#ev:youtube\|~~N3cY7b5ySLU~~}}		{{#ev:youtube\|NP5VckJfv04}}

	Part 4 Lens Alignment and Stigmation		Part 4 Lens Alignment and Stigmation
	{{#ev:youtube\|~~JM8RQ4kQ3UM~~}}		{{#ev:youtube\|CNIrvGRXugU}}

	Part 5 Moving the Stage and Imaging		Part 5 Moving the Stage and Imaging
	{{#ev:youtube\|~~2FAsV9bZB_c~~}}		{{#ev:youtube\|SaaVaILUObg}}

	Part 6 Changing the Sample and Shutdown		Part 6 Changing the Sample and Shutdown
	{{#ev:youtube\|~~oW7xbCM2LZo~~}}		{{#ev:youtube\|c7EVTnVHN-s}}

Cmditradmin: /* Operation */

2010-01-06T21:20:33Z

Operation

← Older revision		Revision as of 14:20, 6 January 2010
Line 17:		Line 17:
	=== Operation ===		=== Operation ===
	Part 1 Tour and Sample Preparation		Part 1 Tour and Sample Preparation
	{{#ev:youtube\|~~3oSbtV4BRRM~~}}		{{#ev:youtube\|QBo_JyRfV3E}}

	Part 2 Loading the Sample		Part 2 Loading the Sample
	{{#ev:youtube\|~~8LKnSZfnuIY~~}}		{{#ev:youtube\|QzDecvtha8k}}

	Part 3 Setting the Working Distance		Part 3 Setting the Working Distance
	{{#ev:youtube\|~~-0a0xWxtMTE~~}}		{{#ev:youtube\|N3cY7b5ySLU}}

	Part 4 Lens Alignment and Stigmation		Part 4 Lens Alignment and Stigmation
	{{#ev:youtube\|~~QXm11ERNXUQ~~}}		{{#ev:youtube\|JM8RQ4kQ3UM}}

	Part 5 Moving the Stage and Imaging		Part 5 Moving the Stage and Imaging
	{{#ev:youtube\|~~-8FH1I_2IcU~~}}		{{#ev:youtube\|2FAsV9bZB_c}}

	Part 6 Changing the Sample and Shutdown		Part 6 Changing the Sample and Shutdown
	{{#ev:youtube\|~~s1OabL2sLBo~~}}		{{#ev:youtube\|oW7xbCM2LZo}}

Cmditradmin at 19:21, 29 December 2009

2009-12-29T19:21:00Z

← Older revision		Revision as of 12:21, 29 December 2009
Line 1:		Line 1:
			<table id="toc" style="width: 100%">
			<tr>
			<td style="text-align: center; width: 33%">[[Main_Page#Research Equipment, Devices and Techniques\|Return to Research Tool Menu]]</td>

			</tr>
			</table>

	=== Overview ===		=== Overview ===
	[[Image:Sirion_sem.png\|thumb\|300px\|]]		[[Image:Sirion_sem.png\|thumb\|300px\|]]